Concentration Meters

The FUD-1 series Fuji Ultrasonic Concentration Meter works on the principle of Ultrasonic Velocity Propagation. Essentially, it measures how long it takes an ultrasonic wave to travel from point A to point B and back in a given solution. Every solution has a unique ultrasonic velocity similar to DNA in humans. Based on a calculation of ultrasonic velocity and relative temperature, the system outputs a real time concentration value via factory standard 4-20mA output and/or RS-232C serial port. Up to 10 chemistries can be stored in the internal data ROM for versatility in adapting to any required process. Both Binary and Ternary models are available for measurements of one or two components of a given solution.

Accurate, real time concentration measurements are essential for many industries, especially electronics and semiconductor manufacturing. In time-critical processes such as Chemical Mechanical Polishing, or CMP, where more than one chemical component is mixed in real time at, or just before the point of use, the time consuming process of titration is decreasingly justified. With highly accurate readings every 0.6 seconds, CMP users are able to add components and make adjustments as needed and those adjustments can be easily integrated and automated within pre-existing or new OEM or in house CMP delivery systems that mix slurry with water and H2O2 oxidizer.
The versatility of the FUD-1 series allows these same advantages to apply for other semiconductor applications such as HF, NH4OH, CeO2 in slurry, TMAH, KOH, Acetic Acid and others. Common Ternary applications include: TMAH + Photo-resist, HF + H2SiF6, Cu + H2SO4, H2O2 + CMP, HF + HNO3, HF + H2O2, H2O2 + NH3 (SC-1) and others. Because Ultrasonic Velocity is unique to each solution, it can be used to accurately measure any component in any mixture.